Invention Grant
- Patent Title: Inline method to monitor ONO stack quality
- Patent Title (中): 监控ONO堆栈质量的内联方法
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Application No.: US13107853Application Date: 2011-05-13
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Publication No.: US08772057B1Publication Date: 2014-07-08
- Inventor: Yu Yang
- Applicant: Yu Yang
- Applicant Address: US CA San Jose
- Assignee: Cypress Semiconductor Corporation
- Current Assignee: Cypress Semiconductor Corporation
- Current Assignee Address: US CA San Jose
- Main IPC: H01L21/66
- IPC: H01L21/66

Abstract:
Structures and methods are provided for determining operating characteristics of a non-volatile memory transistor comprising a charge-storage-layer and a tunneling-layer. In one embodiment, the method comprises: forming a structure including a charge-storage-layer overlying a tunneling-layer on a substrate; depositing a positive charge on the charge-storage-layer and determining a first voltage to establish a first leakage current through the charge-storage-layer and the tunneling-layer; depositing a negative charge on the charge-storage-layer and determining a second voltage to establish a second leakage current through the charge-storage-layer and the tunneling-layer; and determining a differential voltage by calculating a difference between the first and second voltages. Other embodiments are also disclosed.
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