Invention Grant
US08772064B2 Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
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III族氮化物半导体激光器件及III族氮化物半导体激光器件的制造方法
- Patent Title: Group-III nitride semiconductor laser device, and method of fabricating group-III nitride semiconductor laser device
- Patent Title (中): III族氮化物半导体激光器件及III族氮化物半导体激光器件的制造方法
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Application No.: US13289507Application Date: 2011-11-04
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Publication No.: US08772064B2Publication Date: 2014-07-08
- Inventor: Shimpei Takagi , Yusuke Yoshizumi , Koji Katayama , Masaki Ueno , Takatoshi Ikegami
- Applicant: Shimpei Takagi , Yusuke Yoshizumi , Koji Katayama , Masaki Ueno , Takatoshi Ikegami
- Applicant Address: JP Osaka-shi
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka-shi
- Agency: Venable LLP
- Agent Michael A. Sartori; Tamatane J. Aga
- Priority: JP2009-295567 20091225
- Main IPC: H01L21/8252
- IPC: H01L21/8252 ; H01L21/18 ; H01S5/343 ; H01S5/10 ; H01S5/02 ; H01S5/32 ; H01S5/16

Abstract:
A method of fabricating a III-nitride semiconductor laser device includes: preparing a substrate having a hexagonal III-nitride semiconductor and having a semipolar primary surface; forming a substrate product having a laser structure, an anode electrode and a cathode electrode, the laser structure including a substrate and a semiconductor region formed on the semipolar primary surface; scribing a first surface of the substrate product in part in a direction of the a-axis of the hexagonal III-nitride semiconductor; and carrying out breakup of the substrate product by press against a second surface of the substrate product, to form another substrate product and a laser bar.
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