Invention Grant
US08772096B2 Method of forming a contact and method of manufacturing a phase change memory device using the same
有权
形成触点的方法和使用该触点的相变存储器件的制造方法
- Patent Title: Method of forming a contact and method of manufacturing a phase change memory device using the same
- Patent Title (中): 形成触点的方法和使用该触点的相变存储器件的制造方法
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Application No.: US13613277Application Date: 2012-09-13
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Publication No.: US08772096B2Publication Date: 2014-07-08
- Inventor: Seung-Pil Ko , Eun-Jung Kim , Yong-Jun Kim
- Applicant: Seung-Pil Ko , Eun-Jung Kim , Yong-Jun Kim
- Applicant Address: KR Suwon-si, Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si, Gyeonggi-do
- Agency: Volentine & Whitt, PLLC
- Priority: KR10-2012-0019752 20120227
- Main IPC: H01L21/338
- IPC: H01L21/338 ; H01L21/8238 ; H01L21/336

Abstract:
Provided are a method of forming a contact and a method of manufacturing a phase change memory device using the same. The method of forming a contact includes forming on a substrate an insulating layer pattern having first sidewalls extending in a first direction and second sidewalls extending in a second direction perpendicular to the first direction and which together delimit contact holes, forming semiconductor patterns in lower parts of the contact holes, forming isolation spacers on the semiconductor pattern and side surfaces of the first sidewalls to expose portions of the semiconductor patterns, and etching the exposed portions of the semiconductor patterns using the isolation spacers as a mask to divide the semiconductor patterns into a plurality of finer semiconductor patterns.
Public/Granted literature
- US20130224929A1 METHOD OF FORMING A CONTACT AND METHOD OF MANUFACTURING A PHASE CHANGE MEMORY DEVICE USING THE SAME Public/Granted day:2013-08-29
Information query
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