Invention Grant
- Patent Title: Transport conduits for contacts to graphene
- Patent Title (中): 用于石墨烯接触的输送管道
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Application No.: US13524191Application Date: 2012-06-15
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Publication No.: US08772098B2Publication Date: 2014-07-08
- Inventor: Christos D. Dimitrakopoulos , Aaron D. Franklin , Joshua T. Smith
- Applicant: Christos D. Dimitrakopoulos , Aaron D. Franklin , Joshua T. Smith
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Louis J. Percello
- Main IPC: H01L21/336
- IPC: H01L21/336

Abstract:
An apparatus comprises at least one transistor. The at least one transistor comprises a substrate, a graphene layer formed on the substrate, and first and second source/drain regions spaced apart relative to one another on the substrate. The graphene layer comprises at least a first portion and a second portion, the first portion being in contact with the first source/drain region and the second portion being in contact with the second source/drain region. One or more cuts are formed in at least one of the first and second portions of the graphene layer. The apparatus allows for lowered contact resistance in graphene/metal contacts.
Public/Granted literature
- US20130337620A1 TRANSPORT CONDUITS FOR CONTACTS TO GRAPHENE Public/Granted day:2013-12-19
Information query
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