Invention Grant
- Patent Title: Semiconductor device and method for manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
-
Application No.: US13142591Application Date: 2011-01-27
-
Publication No.: US08772127B2Publication Date: 2014-07-08
- Inventor: Haizhou Yin , Huicai Zhong , Huilong Zhu , Zhijiong Luo
- Applicant: Haizhou Yin , Huicai Zhong , Huilong Zhu , Zhijiong Luo
- Applicant Address: CN Beijing
- Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee: Institute of Microelectronics, Chinese Academy of Sciences
- Current Assignee Address: CN Beijing
- Agency: Vierra Magen Marcus LLP
- Priority: CN201010612577 20101229
- International Application: PCT/CN2011/070694 WO 20110127
- International Announcement: WO2012/088778 WO 20120705
- Main IPC: H01L29/772
- IPC: H01L29/772

Abstract:
The present invention provides a semiconductor device and a method for manufacturing the same. The method for manufacturing the semiconductor device comprises: providing a silicon substrate having a gate stack structure formed thereon and having {100} crystal indices; forming an interlayer dielectric layer coving a top surface of the silicon substrate; forming a first trench in the interlayer dielectric layer and/or in the gate stack structure, the first trench having an extension direction being along crystal direction and perpendicular to that of the gate stack structure; and filling the first trench with a first dielectric layer, wherein the first dielectric layer is a tensile stress dielectric layer. The present invention introduces a tensile stress in the transverse direction of a channel region by using a simple process, which improves the response speed and performance of semiconductor devices.
Public/Granted literature
- US20120168881A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2012-07-05
Information query
IPC分类: