Invention Grant
US08772143B2 Field effect transistor devices with dopant free channels and back gates
失效
具有掺杂剂自由通道和后门的场效应晶体管器件
- Patent Title: Field effect transistor devices with dopant free channels and back gates
- Patent Title (中): 具有掺杂剂自由通道和后门的场效应晶体管器件
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Application No.: US13676927Application Date: 2012-11-14
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Publication No.: US08772143B2Publication Date: 2014-07-08
- Inventor: Kangguo Cheng , Bruce B. Doris , Ali Khakifirooz , Ghavam G. Shahidi
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Vazken Alexanian
- Main IPC: H01L21/22
- IPC: H01L21/22

Abstract:
A method of forming a back gate transistor device includes forming an open isolation trench in a substrate; forming sidewall spacers in the open isolation trench; and using the open isolation trench to perform a doping operation so as to define a doped well region below a bottom surface of the isolation trench that serves as a back gate conductor, wherein the sidewall spacers prevent contamination of a channel region of the back gate transistor device by dopants.
Public/Granted literature
- US20140134826A1 FIELD EFFECT TRANSISTOR DEVICES WITH DOPANT FREE CHANNELS AND BACK GATES Public/Granted day:2014-05-15
Information query
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