Invention Grant
US08772171B2 Gas switching section including valves having different flow coefficients for gas distribution system
有权
气体切换部分包括用于气体分配系统的具有不同流量系数的阀
- Patent Title: Gas switching section including valves having different flow coefficients for gas distribution system
- Patent Title (中): 气体切换部分包括用于气体分配系统的具有不同流量系数的阀
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Application No.: US13665289Application Date: 2012-10-31
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Publication No.: US08772171B2Publication Date: 2014-07-08
- Inventor: Dean J. Larson
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Buchanan Ingersoll & Rooney PC
- Main IPC: H01L21/302
- IPC: H01L21/302 ; H01L21/461
Abstract:
A gas switching system for a gas distribution system for supplying different gas compositions to a chamber, such as a plasma processing chamber of a plasma processing apparatus, is provided. The chamber can include multiple zones, and the gas switching section can supply different gases to the multiple zones. The switching section can switch the flows of one or more gases, such that one gas can be supplied to the chamber while another gas can be supplied to a by-pass line, and then switch the gas flows.
Public/Granted literature
- US20140148015A1 GAS SWITCHING SECTION INCLUDING VALVES HAVING DIFFERENT FLOW COEFFICIENTS FOR GAS DISTRIBUTION SYSTEM Public/Granted day:2014-05-29
Information query
IPC分类:
