Invention Grant
US08772682B2 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
有权
用于控制处理室中的多区加热器的温度的方法和装置
- Patent Title: Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
- Patent Title (中): 用于控制处理室中的多区加热器的温度的方法和装置
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Application No.: US13874603Application Date: 2013-05-01
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Publication No.: US08772682B2Publication Date: 2014-07-08
- Inventor: Hari Kishore Ambal , Uwe Paul Haller , Jianhua Zhou
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: H05B3/06
- IPC: H05B3/06 ; C23C16/00

Abstract:
Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
Public/Granted literature
- US20130270252A1 METHODS AND APPARATUS FOR CONTROLLING TEMPERATURE OF A MULTI-ZONE HEATER IN A PROCESS CHAMBER Public/Granted day:2013-10-17
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