Invention Grant
US08772682B2 Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber 有权
用于控制处理室中的多区加热器的温度的方法和装置

Methods and apparatus for controlling temperature of a multi-zone heater in a process chamber
Abstract:
Methods and apparatus for controlling the temperature of multi-zone heater in a process chamber are provided herein. In some embodiments, a method is provided to control a multi-zone heater disposed in a substrate support, wherein the multi-zone heater has a first zone and a second zone. In some embodiments, the method may include measuring a current drawn by the first zone at a first time; measuring a voltage drawn by the first zone at the first time; calculating the resistance of the first zone based upon the measured current and voltage drawn by the first zone at the first time; determining a temperature of the first zone based upon a predetermined relationship between the resistance and the temperature of the first zone; and adjusting the temperature of the first zone in response to the temperature determination.
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