A compound contained in a sample is analyzed more accurately. Provided is an analysis method using TOF-SIMS in which first spectral data is obtained by irradiating the sample with a first primary ion, second spectral data is obtained by irradiating the sample with a second primary ion, and a surface of the sample is etched by an ion and then the surface of the sample is irradiated with the first primary ion or the second primary ion. The first primary ion is more likely to break a molecular structure of a molecule contained in the sample than the second primary ion.