Invention Grant
- Patent Title: Phase plate for a TEM
- Patent Title (中): TEM相片
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Application No.: US13896103Application Date: 2013-05-16
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Publication No.: US08772716B2Publication Date: 2014-07-08
- Inventor: Bart Buijsse
- Applicant: FEI Company
- Applicant Address: US OR Hillsboro
- Assignee: FEI Company
- Current Assignee: FEI Company
- Current Assignee Address: US OR Hillsboro
- Agency: Scheinberg & Associates, PC
- Agent Michael O. Scheinberg
- Priority: EP12168997 20120523
- Main IPC: G21K7/00
- IPC: G21K7/00 ; G01N23/00

Abstract:
A phase plate, specifically a Zernike type phase plate, for use in an electron microscope comprises a central hole, and a thin film causing a phase shift of the electrons passing through said film. This phase shift causes the Contrast Transfer Function (CTF) to change from a sine-like function to a cosine-like function.The phase plate is equipped with a film in the form of an annulus, carried by a much thinner film. As a result only in a small spatial frequency range (for low frequencies) the phase is changed (and thus the CTF), and for other spatial frequencies the phase shift is negligible, and thus the CTF remains unchanged. Due to the much smaller thickness of the carrier film the scattering of electrons is negligible as well.
Public/Granted literature
- US20130313428A1 Phase Plate for a TEM Public/Granted day:2013-11-28
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