Invention Grant
US08772731B2 Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
有权
在半导体检测工具中使样品台运动与时间延迟积分电荷耦合器件同步的装置和方法
- Patent Title: Apparatus and method for synchronizing sample stage motion with a time delay integration charge-couple device in a semiconductor inspection tool
- Patent Title (中): 在半导体检测工具中使样品台运动与时间延迟积分电荷耦合器件同步的装置和方法
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Application No.: US13862148Application Date: 2013-04-12
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Publication No.: US08772731B2Publication Date: 2014-07-08
- Inventor: Pradeep Subrahmanyan , Daniel Wack , Michael Wright , David Alles
- Applicant: KLA-Tencor Corporation
- Applicant Address: US CA Milpitas
- Assignee: KLA-Tencor Corporation
- Current Assignee: KLA-Tencor Corporation
- Current Assignee Address: US CA Milpitas
- Agency: Simpson & Simpson, PLLC
- Main IPC: G01J1/42
- IPC: G01J1/42
Abstract:
A method for synchronizing sample stage motion with a time delay integration (TDI) charge-couple device (CCD) in a semiconductor inspection tool, including: measuring a lateral position of a stage holding a sample being inspected; measuring a vertical position of the stage; determining a corrected lateral position of an imaged pixel of the sample based on the measured lateral and vertical positions; and synchronizing charge transfer of the TDI CCD with the corrected lateral position of the imaged pixel.
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