Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
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Application No.: US13349653Application Date: 2012-01-13
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Publication No.: US08772746B2Publication Date: 2014-07-08
- Inventor: Masaharu Kinoshita , Yoshitaka Sasago , Takashi Kobayashi
- Applicant: Masaharu Kinoshita , Yoshitaka Sasago , Takashi Kobayashi
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Miles & Stockbridge P.C.
- Priority: JP2011-034102 20110221
- Main IPC: H01L47/00
- IPC: H01L47/00

Abstract:
A semiconductor memory device in which the cell area can be decreased and the minimum feature size is not restricted by the thickness of the material forming the memory cell. In a semiconductor memory device, a gate insulating film, a channel extending in a direction X, and a resistance change element extending in the direction X are formed successively above multiple word lines extending in a direction Y, and a portion of the channel and a portion of the resistance change element are disposed above each of the plurality of the word lines. Such configuration can decrease the cell area and ensure the degree of design freedom.
Public/Granted literature
- US20120211717A1 SEMICONDUCTOR MEMORY DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-08-23
Information query
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