Invention Grant
US08772754B2 Semiconductor storage device comprising a memory cell array including a rectifying element and a variable resistor
失效
半导体存储装置包括包括整流元件和可变电阻器的存储单元阵列
- Patent Title: Semiconductor storage device comprising a memory cell array including a rectifying element and a variable resistor
- Patent Title (中): 半导体存储装置包括包括整流元件和可变电阻器的存储单元阵列
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Application No.: US13402058Application Date: 2012-02-22
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Publication No.: US08772754B2Publication Date: 2014-07-08
- Inventor: Murato Kawai
- Applicant: Murato Kawai
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2011-036643 20110223
- Main IPC: H01L29/06
- IPC: H01L29/06

Abstract:
A method of manufacturing a semiconductor storage device according to an embodiment includes: stacking a first wiring layer; stacking a memory cell layer on the first wiring layer; and stacking a stopper film on the memory cell layer. The method of manufacturing a semiconductor storage device also includes: etching the stopper film, the memory cell layer, and the first wiring layer; polishing an interlayer insulating film to the stopper film after burying the stopper film, the memory cell layer, and the first wiring layer with the interlayer insulating film; performing a nitridation process to the stopper film and the interlayer insulating film to form an adjustment film and a block film on surfaces of the stopper film and the interlayer insulating film, respectively; and forming a second wiring layer on the adjustment film, the second wiring layer being electrically connected to the adjustment film.
Public/Granted literature
- US20120211721A1 SEMICONDUCTOR STORAGE DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2012-08-23
Information query
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