Invention Grant
- Patent Title: Prepared and stored GaN substrate
- Patent Title (中): 制备并存储GaN衬底
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Application No.: US13907995Application Date: 2013-06-03
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Publication No.: US08772787B2Publication Date: 2014-07-08
- Inventor: Hideyuki Ijiri , Seiji Nakahata
- Applicant: Sumitomo Electric Industries, Ltd.
- Applicant Address: JP Osaka
- Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee: Sumitomo Electric Industries, Ltd.
- Current Assignee Address: JP Osaka
- Agent James W. Judge
- Priority: JP2006-164832 20060614
- Main IPC: H01L29/15
- IPC: H01L29/15 ; H01L31/0256

Abstract:
A GaN substrate is stored within an atmosphere in which the oxygen concentration is not greater than 15 vol. % and the water-vapor concentration is not greater than 20 g/m3. The GaN substrate (1) has a planar first principal face (1m), and in an arbitrary point (P) along the first principal face (1m) and separated 3 mm or more from the outer edge thereof, the GaN substrate's plane orientation has an off-inclination angle Δα of −10° or more, 10° or less with respect to the plane orientation of an arbitrarily designated crystalline plane (1a) that is inclined 50° or more, 90° or less with respect to a plane (1c), being either the (0001) plane or the (000 1) plane, through the arbitrary point. This enables storing GaN substrates whose principal-face plane orientation is other than (0001) or (000 1), making available GaN substrates with which semiconductor devices of favorable properties can be manufactured.
Public/Granted literature
- US20130256696A1 Prepared and Stored GaN Substrate Public/Granted day:2013-10-03
Information query
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