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US08772808B2 Semiconductor light emitting element and manufacturing method thereof 有权
半导体发光元件及其制造方法

Semiconductor light emitting element and manufacturing method thereof
Abstract:
A manufacturing method of a semiconductor light emitting element, includes forming sacrifice portions within the width of street portions in a semiconductor laminated body, and performing wet etching to remove the sacrifice portions together with their neighboring portions, thereby removing etching residuals in the streets.
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