Invention Grant
- Patent Title: Semiconductor device comprising a lateral bipolar transistor
- Patent Title (中): 包括横向双极晶体管的半导体器件
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Application No.: US14032515Application Date: 2013-09-20
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Publication No.: US08772837B2Publication Date: 2014-07-08
- Inventor: Tomislav Suligoj , Marko Koricic , Hidenori Mochizuki , Soichi Morita
- Applicant: Asahi Kasei Microdevices Corporation
- Applicant Address: JP Tokyo
- Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee: Asahi Kasei Microdevices Corporation
- Current Assignee Address: JP Tokyo
- Agency: Morgan, Lewis & Bockius LLP
- Priority: JP2007-328783 20071220; JP2008-092288 20080331; JP2008-195016 20080729
- Main IPC: H01L21/8249
- IPC: H01L21/8249 ; H01L29/10 ; H01L29/08 ; H01L27/06 ; H01L29/735 ; H01L29/66 ; H01L21/265

Abstract:
A configuration of a lateral transistor suited for the hybrid-integration (BiCMOS) of a high-performance lateral transistor (HCBT) and a CMOS transistor, and a method for manufacturing the lateral transistor. A semiconductor device includes a HCBT 100 and a CMOS transistor 200 hybrid-integrated. The HCBT 100 has an open region 21 opened by etching a device isolating oxide film 6 surrounding an n-hill layer 11. An emitter electrode 31A and a collector electrode 31B are formed in the open region 21 and are composed of a polysilicon film having such a thickness as to expose the n-hill layer 11 exposed by etching the device isolating oxide film, and an ultrathin oxide film 24 covering at least a part of the n-hill layer 11. The ultrathin oxide film 24 functions as a protective film for protecting the n-hill layer 11 from being etched when the polysilicon film is etched.
Public/Granted literature
- US20140035063A1 SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-02-06
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