Invention Grant
- Patent Title: Semiconductor memory device
- Patent Title (中): 半导体存储器件
-
Application No.: US13410608Application Date: 2012-03-02
-
Publication No.: US08772849B2Publication Date: 2014-07-08
- Inventor: Kosei Noda
- Applicant: Kosei Noda
- Applicant Address: JP Atsugi-shi, Kanagawa-ken
- Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee: Semiconductor Energy Laboratory Co., Ltd.
- Current Assignee Address: JP Atsugi-shi, Kanagawa-ken
- Agency: Robinson Intellectual Property Law Office, P.C.
- Agent Eric J. Robinson
- Priority: JP2011-052270 20110310
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/12

Abstract:
A semiconductor memory device includes a semiconductor film; a first gate insulating film covering the semiconductor film; a first gate electrode provided over the semiconductor film with the first gate insulating film interposed therebetween; a first conductive film which is provided over the first gate insulating film; an insulating film which is provided over the first gate insulating film, exposes top surfaces of the first gate electrode and the first conductive film, and has a groove portion between the first gate electrode and the first conductive film; an oxide semiconductor film which is provided over the insulating film and is in contact with the first gate electrode, the first conductive film, and the groove portion; a second gate insulating film covering the oxide semiconductor film; and a second gate electrode provided over the oxide semiconductor film and the groove portion with the second gate insulating film interposed therebetween.
Public/Granted literature
- US20120228687A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2012-09-13
Information query
IPC分类: