Invention Grant
US08772862B2 Semiconductor device and method for fabricating the same 有权
半导体装置及其制造方法

  • Patent Title: Semiconductor device and method for fabricating the same
  • Patent Title (中): 半导体装置及其制造方法
  • Application No.: US13711673
    Application Date: 2012-12-12
  • Publication No.: US08772862B2
    Publication Date: 2014-07-08
  • Inventor: Heung-Jae Cho
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Gyeonggi-do
  • Assignee: SK Hynix Inc.
  • Current Assignee: SK Hynix Inc.
  • Current Assignee Address: KR Gyeonggi-do
  • Agency: IP & T Group LLP
  • Priority: KR10-2012-0077772 20120717
  • Main IPC: H01L29/66
  • IPC: H01L29/66
Semiconductor device and method for fabricating the same
Abstract:
A vertical channel transistor includes a pillar formed over a substrate, and a gate electrode formed on sidewalls of the pillar, wherein the pillar includes a source area, a vertical channel area over the source area, a drain area over the vertical channel area, and a leakage prevention area interposed between the vertical channel area and the drain area.
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