Invention Grant
US08772872B2 Transistors, semiconductor memory cells having a transistor and methods of forming the same
有权
晶体管,具有晶体管的半导体存储单元及其形成方法
- Patent Title: Transistors, semiconductor memory cells having a transistor and methods of forming the same
- Patent Title (中): 晶体管,具有晶体管的半导体存储单元及其形成方法
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Application No.: US12588276Application Date: 2009-10-09
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Publication No.: US08772872B2Publication Date: 2014-07-08
- Inventor: Nam-Kyun Tak , Ki-Whan Song
- Applicant: Nam-Kyun Tak , Ki-Whan Song
- Applicant Address: KR Gyeonggi-do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2008-0099064 20081009
- Main IPC: H01L27/12
- IPC: H01L27/12

Abstract:
Transistors, semiconductor memory cells having a transistor and methods of forming the same are provided, the transistors may include a semiconductor substrate having a first semiconductor region. A gate pattern may be disposed on the first semiconductor region. Spacer patterns may each be disposed on a sidewall of the gate pattern. Second semiconductor regions and a third semiconductor regions may be disposed in the semiconductor substrate. The second semiconductor regions may be disposed under the spacer patterns. The third semiconductor regions may be disposed adjacent to the second semiconductor regions. The first semiconductor region may have a higher impurity ion concentration than the second semiconductor regions.
Public/Granted literature
- US20100090280A1 Transistors, semiconductor memory cells having a transistor and methods of forming the same Public/Granted day:2010-04-15
Information query
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