Invention Grant
- Patent Title: Sealed cavity and method for producing such a sealed cavity
- Patent Title (中): 密封腔和制造这种密封腔的方法
-
Application No.: US13381241Application Date: 2010-07-06
-
Publication No.: US08772883B2Publication Date: 2014-07-08
- Inventor: Jean-Louis Pornin , Fabrice Jacquet
- Applicant: Jean-Louis Pornin , Fabrice Jacquet
- Applicant Address: FR Paris
- Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee: Commissariat a l'energie atomique et aux energies alternatives
- Current Assignee Address: FR Paris
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: FR0954684 20090707
- International Application: PCT/EP2010/059640 WO 20100706
- International Announcement: WO2011/003908 WO 20110113
- Main IPC: H01L29/84
- IPC: H01L29/84

Abstract:
A method for producing a sealed cavity, including: a) producing a sacrificial layer on a substrate; b) producing a cover layer covering at least the sacrificial layer and a portion of the face of the substrate not covered by the sacrificial layer, the cover layer including lateral flanks forming, with the substrate, an angle of less than 90°; c) producing a hole through one of the lateral flanks of the cover layer such that a maximum distance between the substrate and an edge of the hole is less than approximately 3 μm, the hole crossing a portion of the cover layer deposited on a portion of the substrate not covered by the sacrificial layer; d) eliminating the sacrificial layer through the hole, forming the cavity; and e) depositing at least one material plugging the hole in a sealed fashion.
Public/Granted literature
- US20120112293A1 SEALED CAVITY AND METHOD FOR PRODUCING SUCH A SEALED CAVITY Public/Granted day:2012-05-10
Information query
IPC分类: