Invention Grant
US08772910B2 Doping carbon nanotubes and graphene for improving electronic mobility
有权
用于改善电子迁移率的掺杂碳纳米管和石墨烯
- Patent Title: Doping carbon nanotubes and graphene for improving electronic mobility
- Patent Title (中): 用于改善电子迁移率的掺杂碳纳米管和石墨烯
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Application No.: US13306357Application Date: 2011-11-29
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Publication No.: US08772910B2Publication Date: 2014-07-08
- Inventor: Ali Afzali-Ardakani , Bhupesh Chandra , George Stojan Tulevski
- Applicant: Ali Afzali-Ardakani , Bhupesh Chandra , George Stojan Tulevski
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Main IPC: H01L21/02
- IPC: H01L21/02
Abstract:
A method and an apparatus for doping a graphene or nanotube thin-film field-effect transistor device to improve electronic mobility. The method includes selectively applying a dopant to a channel region of a graphene or nanotube thin-film field-effect transistor device to improve electronic mobility of the field-effect transistor device.
Public/Granted literature
- US20130134392A1 Doping Carbon Nanotubes and Graphene for Improving Electronic Mobility Public/Granted day:2013-05-30
Information query
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