Invention Grant
- Patent Title: Test apparatus and circuit module
- Patent Title (中): 测试仪器和电路模块
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Application No.: US13082386Application Date: 2011-04-07
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Publication No.: US08773141B2Publication Date: 2014-07-08
- Inventor: Tsuyoshi Ataka , Shoji Kojima
- Applicant: Tsuyoshi Ataka , Shoji Kojima
- Applicant Address: JP Tokyo
- Assignee: Advantest Corporation
- Current Assignee: Advantest Corporation
- Current Assignee Address: JP Tokyo
- Priority: JP2008-276899 20081028
- Main IPC: G01R31/02
- IPC: G01R31/02

Abstract:
Provided are a first test substrate and a second test substrate opposing each other, a first test circuit testing a device under test and being disposed on a face of the first test substrate that faces the second test substrate, a second test circuit testing the device under test and being disposed on a face of the second test substrate that faces the first test substrate, and a sealing section that is formed by sealing a space between the first test substrate and the second test substrate to enclose the first test circuit and the second test circuit in a common space that is filled with coolant.
Public/Granted literature
- US20120119752A1 TEST APPARATUS AND CIRCUIT MODULE Public/Granted day:2012-05-17
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