Invention Grant

Inspection device
Abstract:
The present invention provides an inspection device including an imaging unit 16 for imaging an object to be inspected, a characteristics measurement unit 15 for measuring characteristics of the object to be inspected, an inspection information acquisition unit 11 for acquiring inspection information related to the object to be inspected, a condition determination unit 12 for determining measurement information related to a measurement condition of the object to be inspected corresponding to the inspection information, an imaging control unit 14 for controlling imaging by the imaging unit, and a measurement control unit 13 for controlling measurement by the characteristics measurement unit based on the measurement information.
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