Invention Grant
- Patent Title: Apparatus for forming image for pattern matching
- Patent Title (中): 用于形成图像匹配的装置
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Application No.: US13575531Application Date: 2011-01-28
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Publication No.: US08774493B2Publication Date: 2014-07-08
- Inventor: Kyoungmo Yang , Yuichi Abe
- Applicant: Kyoungmo Yang , Yuichi Abe
- Applicant Address: JP Tokyo
- Assignee: Hitachi High-Technologies Corporation
- Current Assignee: Hitachi High-Technologies Corporation
- Current Assignee Address: JP Tokyo
- Agency: Crowell & Moring LLP
- Priority: JP2010-016159 20100128
- International Application: PCT/JP2011/051721 WO 20110128
- International Announcement: WO2011/093436 WO 20110804
- Main IPC: G06K9/00
- IPC: G06K9/00

Abstract:
The present invention is a device that creates a template based on design data without performing an exposure simulation, etc., and an object thereof is to provide a pattern matching image forming device capable of forming an image that is commensurate with the size of the actual pattern. As one mode for achieving the object above, there is proposed a pattern matching image forming device that, in forming a matching image, shrinks or enlarges design data based on a desired pattern size, and that forms a matching image based on a pattern thus shrunk or enlarged.
Public/Granted literature
- US20120308152A1 Apparatus for Forming Image for Pattern Matching Public/Granted day:2012-12-06
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