Invention Grant
US08774571B2 Optical device, optical module, and method for manufacturing optical device
有权
光学装置,光学模块以及光学装置的制造方法
- Patent Title: Optical device, optical module, and method for manufacturing optical device
- Patent Title (中): 光学装置,光学模块以及光学装置的制造方法
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Application No.: US13590718Application Date: 2012-08-21
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Publication No.: US08774571B2Publication Date: 2014-07-08
- Inventor: Kazunori Shinoda , Shigeki Makino , Hideo Arimoto
- Applicant: Kazunori Shinoda , Shigeki Makino , Hideo Arimoto
- Applicant Address: JP Kanagawa
- Assignee: Oclaro Japan, Inc.
- Current Assignee: Oclaro Japan, Inc.
- Current Assignee Address: JP Kanagawa
- Agency: Mattingly & Malur, PC
- Priority: JP2011-181886 20110823; JP2012-146126 20120628
- Main IPC: G02B6/12
- IPC: G02B6/12

Abstract:
An optical device includes a substrate and a first optical waveguide including a mesa. The mesa includes a first lower clad layer portion, a first core layer portion, and a first upper clad layer portion. The first lower clad layer portion, the first core layer portion, and the first upper clad layer portion are disposed in this order from the substrate side. The optical device also includes a first etch stop layer configured to stop etching when the first optical waveguide is formed. The first etch stop layer being laminated over the substrate. The first optical waveguide is laminated on the first etch stop layer.
Public/Granted literature
- US20130051725A1 OPTICAL DEVICE, OPTICAL MODULE, AND METHOD FOR MANUFACTURING OPTICAL DEVICE Public/Granted day:2013-02-28
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