Described herein are improved electrode array devices and improved active agent delivery devices. Further described are methods of making and using the improved devices. An improved electrode array device includes a substrate and a plurality of probes disposed on the substrate, wherein the probes are formed from a plurality of aligned carbon nanotubes that are not encapsulated by a structure-providing material. An active agent delivery device includes a substrate having an aperture therein, an active agent delivery member disposed on a first surface of the substrate and having an aperture therein, and an active agent chamber disposed on a second surface of the substrate configured to deliver an active agent through the aperture of the substrate and the aperture of the active agent delivery member.