Invention Grant
- Patent Title: Selective shielding for multiple exposure masks
- Patent Title (中): 多种曝光掩模的选择性屏蔽
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Application No.: US13160173Application Date: 2011-06-14
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Publication No.: US08775978B2Publication Date: 2014-07-08
- Inventor: Jea-Woo Park
- Applicant: Jea-Woo Park
- Applicant Address: US OR Wilsonville
- Assignee: Mentor Graphics Corporation
- Current Assignee: Mentor Graphics Corporation
- Current Assignee Address: US OR Wilsonville
- Agency: Klarquist Sparkman LLP
- Main IPC: G06F17/50
- IPC: G06F17/50

Abstract:
A system for preparing mask data to create a desired layout pattern on a wafer with a multiple exposure photolithographic printing system. In one embodiment, boundaries of features are expanded to create shields for those features, or portions thereof, that are not oriented in a direction that are printed with greater fidelity by an illumination pattern used in the multiple exposure printing system.
Public/Granted literature
- US20110252385A1 SELECTIVE SHIELDING FOR MULTIPLE EXPOSURE MASKS Public/Granted day:2011-10-13
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