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US08775978B2 Selective shielding for multiple exposure masks 有权
多种曝光掩模的选择性屏蔽

Selective shielding for multiple exposure masks
Abstract:
A system for preparing mask data to create a desired layout pattern on a wafer with a multiple exposure photolithographic printing system. In one embodiment, boundaries of features are expanded to create shields for those features, or portions thereof, that are not oriented in a direction that are printed with greater fidelity by an illumination pattern used in the multiple exposure printing system.
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