Invention Grant
- Patent Title: Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another
- Patent Title (中): 用于确定围绕彼此垂直的三个空间轴的旋转运动的微型陀螺仪
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Application No.: US13258177Application Date: 2010-03-08
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Publication No.: US08776599B2Publication Date: 2014-07-15
- Inventor: Hanno Hammer
- Applicant: Hanno Hammer
- Applicant Address: US CA San Jose
- Assignee: Maxim Integrated Products, Inc.
- Current Assignee: Maxim Integrated Products, Inc.
- Current Assignee Address: US CA San Jose
- Agency: North Weber & Baugh LLP
- Priority: DE102009001922 20090326
- International Application: PCT/EP2010/052880 WO 20100308
- International Announcement: WO2010/108773 WO 20100930
- Main IPC: G01P15/14
- IPC: G01P15/14

Abstract:
A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis.
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