Invention Grant
US08776599B2 Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another 有权
用于确定围绕彼此垂直的三个空间轴的旋转运动的微型陀螺仪

  • Patent Title: Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another
  • Patent Title (中): 用于确定围绕彼此垂直的三个空间轴的旋转运动的微型陀螺仪
  • Application No.: US13258177
    Application Date: 2010-03-08
  • Publication No.: US08776599B2
    Publication Date: 2014-07-15
  • Inventor: Hanno Hammer
  • Applicant: Hanno Hammer
  • Applicant Address: US CA San Jose
  • Assignee: Maxim Integrated Products, Inc.
  • Current Assignee: Maxim Integrated Products, Inc.
  • Current Assignee Address: US CA San Jose
  • Agency: North Weber & Baugh LLP
  • Priority: DE102009001922 20090326
  • International Application: PCT/EP2010/052880 WO 20100308
  • International Announcement: WO2010/108773 WO 20100930
  • Main IPC: G01P15/14
  • IPC: G01P15/14
Micro gyroscope for determining rotational movements about three spatial axes which are perpendicular to one another
Abstract:
A micro gyroscope determine three-dimensional rotational movements is mounted on a substrate on which a plurality of masses tangentially oscillate about the z axis perpendicular to the substrate. The oscillating masses are fastened to the substrate by springs and bolts. Driving elements maintain oscillating tangential vibrations of the masses about the z axis. Upon rotation of the substrate about any spatial axis, the masses are subjected to deflections caused by Corolis forces that are detected by sensor elements. Certain masses oscillating about the z axis are tiltable about the x axis, while some others are tiltable about the y axis. At least one other mass is configured to deflect radially to the z axis in a x-y plane parallel to the plane of the substrate. This mass is assigned a sensor element that can deflect radially with respect to the axis but cannot oscillate about the z axis.
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