Invention Grant
- Patent Title: Stamper and method of manufacturing the same
- Patent Title (中): 压模及其制造方法
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Application No.: US13077537Application Date: 2011-03-31
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Publication No.: US08778162B2Publication Date: 2014-07-15
- Inventor: Masatoshi Sakurai , Takuya Shimada , Shinobu Sugimura , Satoshi Shirotori
- Applicant: Masatoshi Sakurai , Takuya Shimada , Shinobu Sugimura , Satoshi Shirotori
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2010-102572 20100427
- Main IPC: C25D1/00
- IPC: C25D1/00 ; C25D1/20

Abstract:
According to one embodiment, a stamper manufacturing method comprises electroless plating by using a master includes a substrate, a conductive underlayer formed on the substrate and having catalytic activity, projecting patterns having no catalytic activity and partially formed on a surface of the conductive underlayer having catalytic activity, and regions in which the conductive underlayer having catalytic activity is exposed between the projecting patterns to deposit selectively an amorphous conductive layer between the projecting patterns and in the regions in which the conductive underlayer is exposed, and forming stamper projections, electroplating on the stamper projections includes the projecting patterns and the amorphous conductive layer by using the amorphous conductive layer and the conductive underlayer as electrodes to form a stamper main body made of a crystalline metal, and releasing a stamper includes the stamper projections and the stamper main body from the master.
Public/Granted literature
- US20110262580A1 STAMPER AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2011-10-27
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