Invention Grant
- Patent Title: Component having a through-connection
- Patent Title (中): 具有通过连接的部件
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Application No.: US13744611Application Date: 2013-01-18
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Publication No.: US08778194B2Publication Date: 2014-07-15
- Inventor: Jochen Reinmuth , Yvonne Bergmann
- Applicant: Jochen Reinmuth , Yvonne Bergmann
- Applicant Address: DE Stuttgart
- Assignee: Robert Bosch GmbH
- Current Assignee: Robert Bosch GmbH
- Current Assignee Address: DE Stuttgart
- Agency: Kenyon & Kenyon LLP
- Priority: DE102012200840 20120120
- Main IPC: H01L21/302
- IPC: H01L21/302

Abstract:
A method is described for manufacturing a component having a through-connection. The method includes providing a substrate; forming a trench structure in the substrate, a substrate area which is completely surrounded by the trench structure being produced; forming a closing layer for closing off the trench structure, a cavity girded by the closing layer being formed in the area of the trench structure; removing substrate material from the substrate area surrounded by the closed-off trench structure; and at least partially filling the substrate area surrounded by the closed-off trench structure with a metallic material. A component having a through-connection is also described.
Public/Granted literature
- US20130189483A1 COMPONENT HAVING A THROUGH-CONNECTION Public/Granted day:2013-07-25
Information query
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