Invention Grant
US08785993B2 Solid-state imaging element, manufacturing method, and electronic device 有权
固态成像元件,制造方法和电子器件

  • Patent Title: Solid-state imaging element, manufacturing method, and electronic device
  • Patent Title (中): 固态成像元件,制造方法和电子器件
  • Application No.: US13564030
    Application Date: 2012-08-01
  • Publication No.: US08785993B2
    Publication Date: 2014-07-22
  • Inventor: Takashi Abe
  • Applicant: Takashi Abe
  • Applicant Address: JP
  • Assignee: Sony Corporation
  • Current Assignee: Sony Corporation
  • Current Assignee Address: JP
  • Agency: Sheridan Ross P.C.
  • Priority: JP2011-176721 20110812
  • Main IPC: H01L31/06
  • IPC: H01L31/06 H01L21/00
Solid-state imaging element, manufacturing method, and electronic device
Abstract:
A solid-state imaging element includes a pixel having a photoelectric conversion section and a side pinning layer. The photoelectric conversion section is formed in a semiconductor substrate. The side pinning layer is formed on a side of the photoelectric conversion section. The side pinning layer is formed by performing ion implantation in a state of a trench being open, the trench being formed in a part on a side of a region in which the photoelectric conversion section is formed.
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