Invention Grant
- Patent Title: Positioning apparatus
- Patent Title (中): 定位装置
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Application No.: US13166573Application Date: 2011-06-22
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Publication No.: US08786831B2Publication Date: 2014-07-22
- Inventor: Tosiya Asano , Yugo Shibata , Atsushi Kimura
- Applicant: Tosiya Asano , Yugo Shibata , Atsushi Kimura
- Applicant Address: JP Tokyo
- Assignee: Canon Kabushiki Kaisha
- Current Assignee: Canon Kabushiki Kaisha
- Current Assignee Address: JP Tokyo
- Agency: Canon USA Inc. IP Division
- Priority: JP2005-033017 20050209
- Main IPC: G03B27/58
- IPC: G03B27/58 ; H02K41/02 ; G03F7/20

Abstract:
A positioning apparatus includes a moving member, an actuator, and a controller. The moving member can move in at least a first direction. The actuator is provided along the first direction. The controller controls a current applied to the actuator in order to support the weight of the moving member. The bending rigidity of the moving member in the first direction is greater than the bending rigidity of the moving member in a second direction perpendicular to the first direction.
Public/Granted literature
- US20110248578A1 POSITIONING APPARATUS Public/Granted day:2011-10-13
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