Invention Grant
- Patent Title: Optical device with variable wavelength interference filter
- Patent Title (中): 具有可变波长干涉滤光片的光学装置
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Application No.: US13238312Application Date: 2011-09-21
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Publication No.: US08786861B2Publication Date: 2014-07-22
- Inventor: Tatsuaki Funamoto
- Applicant: Tatsuaki Funamoto
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-254066 20101112
- Main IPC: G01J3/26
- IPC: G01J3/26 ; G02B13/22 ; G02B26/00

Abstract:
An optical device includes a telecentric optical system, a variable wavelength interference filter, and a detection section, the variable wavelength interference filter includes a first reflecting film, a second reflecting film provided to a movable section, and an electrostatic actuator adapted to displace the movable section, an effective measurement area capable of transmitting a light with a wavelength, which is within a predetermined allowable range centered on a measurement center wavelength when an amount of the displacement of the movable section takes a maximum displacement value, is set in the first reflecting film and the second reflecting film, and the telecentric optical system guides the incident light to the variable wavelength interference filter so that a principal ray of the incident light is parallel thereto and perpendicular to the first reflecting film, and at the same time, collects the incident light in the effective measurement area.
Public/Granted literature
- US20120120403A1 OPTICAL DEVICE Public/Granted day:2012-05-17
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