Invention Grant
US08790549B2 Electronic component provided with Cu—Al—Co-based alloy electrode or wiring
有权
电子元件配有Cu-Al-Co基合金电极或布线
- Patent Title: Electronic component provided with Cu—Al—Co-based alloy electrode or wiring
- Patent Title (中): 电子元件配有Cu-Al-Co基合金电极或布线
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Application No.: US13263359Application Date: 2010-04-08
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Publication No.: US08790549B2Publication Date: 2014-07-29
- Inventor: Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
- Applicant: Takahiko Kato , Takashi Naito , Hiroki Yamamoto , Takuya Aoyagi , Seiichi Watanabe , Seiji Miura , Norihito Sakaguchi , Kazuki Aoshima , Kenji Ohkubo
- Applicant Address: JP Tokyo
- Assignee: Hitachi, Ltd.
- Current Assignee: Hitachi, Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Antonelli, Terry, Stout & Kraus, LLP.
- Priority: JP2009-095628 20090410
- International Application: PCT/JP2010/002573 WO 20100408
- International Announcement: WO2010/116746 WO 20101014
- Main IPC: H01B1/02
- IPC: H01B1/02 ; H05K1/09 ; C22C9/00 ; C22C9/02 ; C22C9/01 ; C22C9/06

Abstract:
An object of the present invention is to provide an electronic component using a Cu-based conductive material that can suppress oxidization even in a heat treatment in an oxidizing atmosphere and that can suppress an increase in an electrical resistance. In an electronic component having an electrode or a wiring, a ternary alloy made from three elements consisting of Cu, Al, and Co is used as a Cu-based wiring material that can prevent oxidization of the electrode or the wiring. Specifically, part or the whole of the electrode or the wiring has a chemical composition in which an Al content is 10 at % to 25 at %, a Co content is 5 at % to 20 at %, and the balance is composed of Cu and unavoidable impurities, and the chemical composition represents a ternary alloy in which two phases of a Cu solid solution formed by Al and Co being dissolved into Cu and a CoAl intermetallic compound coexist together.
Public/Granted literature
- US20120285733A1 ELECTRONIC COMPONENT PROVIDED WITH CU-AL-CO-BASED ALLOY ELECTRODE OR WIRING Public/Granted day:2012-11-15
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