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US08790600B2 Sample-support element for ultra-high vacuums 有权
用于超高真空的样品支撑元件

Sample-support element for ultra-high vacuums
Abstract:
The invention discloses a sample-support element for ultra-high vacuums comprising a main chamber and a supplementary chamber for the sample holder and the heating/cooling elements, which is pumped by a related pump line. This enables the reduction or total elimination of the negative effect related to the alteration of the residual atmosphere in ultra-high vacuums resulting from heating or cooling the surfaces of the sample holder.
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