Invention Grant
US08791006B2 Semiconductor device and method of forming an inductor on polymer matrix composite substrate
有权
在聚合物基体复合衬底上形成电感器的半导体器件和方法
- Patent Title: Semiconductor device and method of forming an inductor on polymer matrix composite substrate
- Patent Title (中): 在聚合物基体复合衬底上形成电感器的半导体器件和方法
-
Application No.: US12726880Application Date: 2010-03-18
-
Publication No.: US08791006B2Publication Date: 2014-07-29
- Inventor: Yaojian Lin
- Applicant: Yaojian Lin
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L21/44
- IPC: H01L21/44 ; H01L21/20

Abstract:
A semiconductor device has a first insulating layer formed over a first surface of a polymer matrix composite substrate. A first conductive layer is formed over the first insulating layer. A second insulating layer is formed over the first insulating layer and first conductive layer. A second conductive layer is formed over the second insulating layer and first conductive layer. The second conductive layer is wound to exhibit inductive properties. A third conductive layer is formed between the first conductive layer and second conductive layer. A third insulating layer is formed over the second insulating layer and second conductive layer. A bump is formed over the second conductive layer. A fourth insulating layer can be formed over a second surface of the polymer matrix composite substrate. Alternatively, the fourth insulating layer can be formed over the first insulating layer prior to forming the first conductive layer.
Public/Granted literature
- US20130181323A9 Semiconductor Device and Method of Forming an Inductor on Polymer Matrix Composite Substrate Public/Granted day:2013-07-18
Information query
IPC分类: