Invention Grant
- Patent Title: Load chamber with heater for a disk sputtering system
- Patent Title (中): 带加热器的加载室，用于圆盘溅射系统
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Application No.: US13781478Application Date: 2013-02-28
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Publication No.: US08791391B2Publication Date: 2014-07-29
- Inventor: Allen J. Bourez
- Applicant: Allen J. Bourez
- Applicant Address: US CA San Jose
- Assignee: WD Media, LLC
- Current Assignee: WD Media, LLC
- Current Assignee Address: US CA San Jose
- Main IPC: F27D5/00
- IPC: F27D5/00
Abstract:
A disk processing system having a plurality of processing chambers, a load chamber comprising a heater, and a disk transport system coupled to the plurality of processing chambers and the load chamber to transport a disk there among.
Public/Granted literature
- US20130175252A1 LOAD CHAMBER WITH HEATER FOR A DISK SPUTTERING SYSTEM Public/Granted day:2013-07-11
Information query
