Invention Grant
US08791526B2 Vertical type integrated circuit devices and memory devices including conductive lines supported by Mesa structures and methods of fabricating the same 有权
包括由Mesa结构支撑的导电线的垂直型集成电路器件和存储器件及其制造方法

Vertical type integrated circuit devices and memory devices including conductive lines supported by Mesa structures and methods of fabricating the same
Abstract:
A vertical type integrated circuit device includes a substrate and a pillar vertically protruding from the substrate. The pillar includes a lower impurity region and an upper impurity region therein and a vertical channel region therebetween. A portion of the pillar including the lower impurity region therein includes a mesa laterally extending therefrom. The device further includes a first conductive line extending on a first sidewall of the pillar and electrically contacting the lower impurity region, and a second conductive line extending on a second sidewall of the pillar adjacent the vertical channel region. The second conductive line extends in a direction perpendicular to the first conductive line and is spaced apart from the mesa. Related devices and methods of fabrication are also discussed.
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