Invention Grant
US08791530B2 Compliant micro device transfer head with integrated electrode leads 有权
具有集成电极引线的符合标准的微器件传输头

Compliant micro device transfer head with integrated electrode leads
Abstract:
A compliant micro device transfer head and head array are disclosed. In an embodiment a micro device transfer head includes a spring arm having integrated electrode leads that is deflectable into a space between a base substrate and the spring arm.
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