Invention Grant
US08791621B2 Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus 有权
表面声波谐振器,表面声波振荡器和电子设备

Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
Abstract:
A surface acoustic wave resonator includes a quartz substrate with preselected Euler angles and an IDT on the quartz substrate. The IDT includes electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. Assuming a surface acoustic wave wavelength is λ, an electrode finger film thickness is H, an inter-electrode finger groove depth is G, a line occupation rate of convex portions of the substrate between the inter-electrode finger grooves is ηg, and a line occupation rate of the electrode fingers on the convex portions is ηe, 0.0407λ≦G+H; and ηg>ηe.
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