Invention Grant
- Patent Title: Surface acoustic wave resonator, surface acoustic wave oscillator, and electronic apparatus
- Patent Title (中): 表面声波谐振器,表面声波振荡器和电子设备
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Application No.: US14066959Application Date: 2013-10-30
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Publication No.: US08791621B2Publication Date: 2014-07-29
- Inventor: Takuya Owaki , Kunihito Yamanaka , Keigo Iizawa , Kenichi Hano
- Applicant: Seiko Epson Corporation
- Applicant Address: JP
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Current Assignee Address: JP
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: JP2010-270953 20101203
- Main IPC: H01L41/047
- IPC: H01L41/047

Abstract:
A surface acoustic wave resonator includes a quartz substrate with preselected Euler angles and an IDT on the quartz substrate. The IDT includes electrode fingers and excites a stop band upper end mode surface acoustic wave. Inter-electrode finger grooves are provided between the electrode fingers. Assuming a surface acoustic wave wavelength is λ, an electrode finger film thickness is H, an inter-electrode finger groove depth is G, a line occupation rate of convex portions of the substrate between the inter-electrode finger grooves is ηg, and a line occupation rate of the electrode fingers on the convex portions is ηe, 0.0407λ≦G+H; and ηg>ηe.
Public/Granted literature
- US20140055207A1 SURFACE ACOUSTIC WAVE RESONATOR, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS Public/Granted day:2014-02-27
Information query
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