Invention Grant
US08792153B2 Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component 有权
微机械部件,通过制造方法制造的中间产品以及微机械部件的制造方法

  • Patent Title: Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component
  • Patent Title (中): 微机械部件,通过制造方法制造的中间产品以及微机械部件的制造方法
  • Application No.: US13586363
    Application Date: 2012-08-15
  • Publication No.: US08792153B2
    Publication Date: 2014-07-29
  • Inventor: Jochen Reinmuth
  • Applicant: Jochen Reinmuth
  • Applicant Address: DE Stuttgart
  • Assignee: Robert Bosch GmbH
  • Current Assignee: Robert Bosch GmbH
  • Current Assignee Address: DE Stuttgart
  • Agency: Kenyon & Kenyon LLP
  • Priority: DE102011081002 20110816
  • Main IPC: G02B26/08
  • IPC: G02B26/08 G02B26/00
Micromechanical component, intermediate product produced by a manufacturing method, and manufacturing method for a micromechanical component
Abstract:
A micromechanical component having a displaceable part connected to a residual substrate by at least one spring, and including first and second subunits, between which an insulating intermediate layer and at least one semiconductor boundary layer is formed; an inner region of the first subunit, which inner region is aligned with the second subunit, being patterned out of a substrate using at least one cavity etched in a first etching direction; an outer region of the first subunit of the displaceable part, which outer region faces away from the second subunit, being patterned out of the substrate using at least one hollowed-out section etched in a second etching direction; the second subunit being patterned out of a semiconductor layer deposited onto the insulating intermediate layer and/or on the at least one semiconductor boundary layer using at least one continuous separating trench. Also described is a related manufacturing method.
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