Invention Grant
US08792278B2 Non-volatile memory semiconductor storage including contact plug
有权
包括接触插头的非易失性存储器半导体存储器
- Patent Title: Non-volatile memory semiconductor storage including contact plug
- Patent Title (中): 包括接触插头的非易失性存储器半导体存储器
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Application No.: US13716310Application Date: 2012-12-17
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Publication No.: US08792278B2Publication Date: 2014-07-29
- Inventor: Hiroyuki Nagashima
- Applicant: Hiroyuki Nagashima
- Applicant Address: JP Tokyo
- Assignee: Kabushiki Kaisha Toshiba
- Current Assignee: Kabushiki Kaisha Toshiba
- Current Assignee Address: JP Tokyo
- Agency: Oblon, Spivak, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2009-14413 20090126
- Main IPC: H01L27/10
- IPC: H01L27/10 ; H01L45/00 ; H01L27/04 ; H01L27/24 ; H01L27/06 ; H01L27/02

Abstract:
A non-volatile semiconductor memory device includes: a cell array including a plurality of first wirings, a plurality of second wirings that intersects the plurality of first wirings, and memory cells that are formed at intersections of the first wirings and the second wirings and are connected between the first and second wirings; a first contact plug that comes into contact with a side portion of the first wiring provided at a first position and extends to the first wiring provided at a second position higher than the first position in a laminated direction; and a second contact plug that comes into contact with a side portion of the second wiring provided at a third position between the first position and the second position and extends to the second wiring provided at a fourth position higher than the second position in the laminated direction.
Public/Granted literature
- US20130099348A1 NON-VOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2013-04-25
Information query
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