Invention Grant
US08793849B1 Method of manufacturing high frequency thickness shear mode gas and organic vapor sensors 有权
制造高频厚度剪切模式气体和有机蒸汽传感器的方法

Method of manufacturing high frequency thickness shear mode gas and organic vapor sensors
Abstract:
A method of fabricating a thickness shear mode (TSM) gas and organic vapor sensor having a visco-elastic polymer coating and a fundamental frequency greater than 20 MHz. The method begins by providing a piezoelectric crystal and milling a central region of the crystal. Milling the crystal creates a central oscillating region of reduced thickness surrounded by a thicker outer region. Two electrodes are then deposited in the oscillating region of the crystal—one on each side of the crystal. The oscillating region on both sides of the crystal and the electrodes are then coated with a polymer coating.
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