Invention Grant
- Patent Title: Micromechanical Coriolis rate of rotation sensor
- Patent Title (中): 微机械科里奥利转速传感器
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Application No.: US13128709Application Date: 2009-11-11
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Publication No.: US08794066B2Publication Date: 2014-08-05
- Inventor: Peter Merz , Manfred Weiss
- Applicant: Peter Merz , Manfred Weiss
- Applicant Address: DE Munich
- Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten E.V.
- Current Assignee: Fraunhofer-Gesellschaft zur Foerderung der Angewandten E.V.
- Current Assignee Address: DE Munich
- Agency: Stevens & Showalter, L.L.P.
- Priority: EP08168846 20081111
- International Application: PCT/EP2009/064984 WO 20091111
- International Announcement: WO2010/055055 WO 20100520
- Main IPC: G01C19/56
- IPC: G01C19/56 ; G01C19/5719 ; G01C19/5755 ; G01C19/5712 ; G01C19/574

Abstract:
The invention relates to a micromechanical Coriolis rate of rotation sensor for detecting rates of rotation with components around measuring axes in three spatial directions which are orthogonal to one another. The Coriolis rate of rotation sensor has a substrate, a detection mass and at least two drive masses, wherein the drive masses can each be driven to perform a primary movement relative to the substrate. The direction of the primary movement of one of the at least two drive masses is perpendicular to the direction of the primary movement of another of the at least two drive masses. The detection mass is coupled to the drive masses. The invention also relates to an Inertial Measurement Unit (IMU) and to a method for detecting rates of rotation in three spatial directions which are orthogonal to one another.
Public/Granted literature
- US20120017677A1 MICROMECHANICAL CORIOLIS RATE OF ROTATION SENSOR Public/Granted day:2012-01-26
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