Invention Grant
- Patent Title: Double-axis rotation rate sensor
- Patent Title (中): 双轴转速传感器
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Application No.: US13255321Application Date: 2010-03-11
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Publication No.: US08794067B2Publication Date: 2014-08-05
- Inventor: Bernhard Schmid , Stefan Günthner , Ramnath Sivaraman
- Applicant: Bernhard Schmid , Stefan Günthner , Ramnath Sivaraman
- Applicant Address: DE
- Assignee: Continental Teves AG & Co. oHG
- Current Assignee: Continental Teves AG & Co. oHG
- Current Assignee Address: DE
- Agency: RatnerPrestia
- Priority: DE102009012269 20090311
- International Application: PCT/EP2010/053145 WO 20100311
- International Announcement: WO2010/103093 WO 20100916
- Main IPC: G01C19/56
- IPC: G01C19/56

Abstract:
A micromechanical rotation rate sensor, comprising at least one substrate, wherein the rotation rate sensor has at least a first and a second seismic mass which are coupled to one another by means of at least one coupling beam, and wherein the rotation rate sensor is embodied in such a way that it can detect rotation rates about at least a first and a second sensitive axis, wherein each seismic mass is assigned at least one actuator unit with which the deflection behavior of the seismic mass can be influenced.
Public/Granted literature
- US20120048016A1 DOUBLE-AXIS ROTATION RATE SENSOR Public/Granted day:2012-03-01
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