Invention Grant
- Patent Title: Scanning acoustic microscope with profilometer function
- Patent Title (中): 用轮廓仪功能扫描声学显微镜
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Application No.: US12244460Application Date: 2008-10-02
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Publication No.: US08794072B2Publication Date: 2014-08-05
- Inventor: Lawrence W. Kessler , Michael G. Oravecz , Zhiqi Guo
- Applicant: Lawrence W. Kessler , Michael G. Oravecz , Zhiqi Guo
- Applicant Address: US IL Elk Grove Village
- Assignee: Sonoscan, Inc.
- Current Assignee: Sonoscan, Inc.
- Current Assignee Address: US IL Elk Grove Village
- Agency: McCracken & Frank LLC
- Main IPC: G01N29/06
- IPC: G01N29/06

Abstract:
A scanning acoustic microscope, includes an ultrasonic transducer, a data storage memory, a display, a scanner assembly, and a controller. The controller is adapted to cause the motor to move the transducer along a path with respect to a sample, and cause the ultrasonic transducer to emit a pulse of acoustic energy towards the sample at each point in a plurality of points along the path. In addition, the controller is adapted to cause the ultrasonic transducer to receive a set of reflection signals that correspond to each of the pulses emitted therefrom. The sets of reflection signals are used to generate an image of a profile of the sample and an image representative of acoustic impedance features in the interior of the sample. The image of the profile of the sample shows a variation in height across a surface of the sample.
Public/Granted literature
- US20090095086A1 SCANNING ACOUSTIC MICROSCOPE WITH PROFILOMETER FUNCTION Public/Granted day:2009-04-16
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