Invention Grant
- Patent Title: Pressure sensor
- Patent Title (中): 压力传感器
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Application No.: US13258543Application Date: 2010-03-24
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Publication No.: US08794077B2Publication Date: 2014-08-05
- Inventor: Michael Philipps
- Applicant: Michael Philipps
- Applicant Address: DE Maulburg
- Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee: Endress + Hauser GmbH + Co. KG
- Current Assignee Address: DE Maulburg
- Agency: Bacon & Thomas, PLLC
- Priority: DE102009001892 20090326
- International Application: PCT/EP2010/053825 WO 20100324
- International Announcement: WO2010/108949 WO 20100930
- Main IPC: G01L9/00
- IPC: G01L9/00

Abstract:
A pressure sensor, comprising: a monocrystalline membrane body, which includes a measuring membrane and an edge region surrounding the measuring membrane. The edge region has a greater material thickness than the measuring membrane and the edge region has a first mounting surface, whose surface normal is given by a first principal crystal axis. A monocrystalline substrate, which, with respect to crystal structure, comprises the same semiconductor material as the membrane body, the substrate has a second mounting surface, whose surface normal extends parallel to the first principal crystal axis. The membrane body is tightly connected to the substrate by joining the first mounting surface to the second mounting surface. The orientations of other principal crystal axes of the membrane body and the substrate are, in each case, oriented parallel relative to one another.
Public/Granted literature
- US20120017690A1 Pressure Sensor Public/Granted day:2012-01-26
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