Invention Grant
US08795434B2 Method and apparatus for mass production of graphene and carbon tubes by deposition of carbon atoms, on flat surfaces and inside walls of tubes, generated from dissociation of a carbon-containing gas stimulated by a tunable high power pulsed laser
有权
通过沉积由可调谐高功率脉冲激光器刺激的含碳气体解离产生的碳原子,在管的平坦表面和内壁上大量生产石墨烯和碳管的方法和装置
- Patent Title: Method and apparatus for mass production of graphene and carbon tubes by deposition of carbon atoms, on flat surfaces and inside walls of tubes, generated from dissociation of a carbon-containing gas stimulated by a tunable high power pulsed laser
- Patent Title (中): 通过沉积由可调谐高功率脉冲激光器刺激的含碳气体解离产生的碳原子,在管的平坦表面和内壁上大量生产石墨烯和碳管的方法和装置
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Application No.: US12807282Application Date: 2010-09-01
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Publication No.: US08795434B2Publication Date: 2014-08-05
- Inventor: Jaw Tian Lin
- Applicant: Jaw Tian Lin
- Main IPC: H01L21/306
- IPC: H01L21/306 ; C23C16/00 ; C23C16/44 ; C23C16/48 ; C23F1/00

Abstract:
A method and apparatus for mass production of graphene and carbon tubes is presented. A carbon-containing gas (CCG) inside a set of thin gaps formed by an array of flat plates, or small multiple bores in a cylindrical shell, is maintained under free molecular conditions at all times. A train of intermittent light pulses of a tunable high power laser beam compatible with the CCG's major absorption bands is sent through the CCG inside the gaps, or bores, to cause dissociation of the carbon atoms from the CCG molecules in said molecules' one mean free path of flight and deposition of said atoms onto the adjacent solid surfaces (plate or bore walls) during each pulse, and after a pre-determined number of pulses to form a one-atom-thick layer of hexagonal lattice of carbon atoms. Said carbon atom layers on the flat plate surfaces are graphene, those on the shell bore walls carbon tubes. Large quantity and size, and predicted high quality of products are special features of this method.
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