Invention Grant
US08795769B2 Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
有权
方法和用于沉积材料薄膜或以其他方式加工或检查的装置，当基板通过由多个相对和平衡的空气轴承平台引导的真空环境中并且通过差分泵送的树丛密封并且以非接触的方式密封 方式
- Patent Title: Method and a device for depositing a film of material or otherwise processing or inspecting, a substrate as it passes through a vacuum environment guided by a plurality of opposing and balanced air bearing lands and sealed by differentially pumped groves and sealing lands in a non-contact manner
- Patent Title (中): 方法和用于沉积材料薄膜或以其他方式加工或检查的装置，当基板通过由多个相对和平衡的空气轴承平台引导的真空环境中并且通过差分泵送的树丛密封并且以非接触的方式密封 方式
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Application No.: US11497531Application Date: 2006-08-02
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Publication No.: US08795769B2Publication Date: 2014-08-05
- Inventor: Andrew J. Devitt
- Applicant: Andrew J. Devitt
- Applicant Address: US PA Aston
- Assignee: New Way Machine Components, Inc.
- Current Assignee: New Way Machine Components, Inc.
- Current Assignee Address: US PA Aston
- Agency: Volpe and Koenig, P.C.
- Main IPC: C23C14/56
- IPC: C23C14/56
Abstract:
A method and apparatus for coating and baking and deposition of surfaces on glass substrate or flexible substrate, such as films and thin glass sheets or other similar work pieces as it transitions thru and between small gaps of aero-static or hydro-static porous media bearings and differentially pumped vacuum grooves, in a non-contact manner, in order to process within a vacuum environment. The process is also intended to incorporate simultaneous and immediately sequential ordering of various processes.
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