Invention Grant
US08795948B2 Resist composition, method of forming resist pattern and polymeric compound
有权
抗蚀剂组合物,抗蚀剂图案和高分子化合物的形成方法
- Patent Title: Resist composition, method of forming resist pattern and polymeric compound
- Patent Title (中): 抗蚀剂组合物,抗蚀剂图案和高分子化合物的形成方法
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Application No.: US13847323Application Date: 2013-03-19
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Publication No.: US08795948B2Publication Date: 2014-08-05
- Inventor: Takahiro Dazai , Yoshiyuki Utsume , Jun Iwashita , Kensuke Matsuzawa , Kenri Konno
- Applicant: Tokyo Ohka Kogyo Co., Ltd.
- Applicant Address: JP Kawasaki-shi
- Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee: Tokyo Ohka Kogyo Co., Ltd.
- Current Assignee Address: JP Kawasaki-shi
- Agency: Knobbe Martens Olson & Bear LLP
- Priority: JP2012-066366 20120322
- Main IPC: G03F7/004
- IPC: G03F7/004 ; C08F220/38 ; C07C69/54

Abstract:
A resist composition including a base component (A) which generates acid upon exposure and exhibits changed solubility in a developing solution under the action of acid, the base component (A) containing a polymeric compound (A1) including a structural unit (a0) represented by general formula (a0-1) shown below, a structural unit (a1) containing an acid decomposable group which exhibits increased polarity by the action of acid and a structural unit (a6) which generates acid upon exposure (wherein R1 represents a hydrogen atom, an alkyl group or a halogenated alkyl group; W represents —COO—, —CONH— or a divalent aromatic hydrocarbon group; Y1 and Y2 represents a divalent linking group or a single bond; R′1 represents a hydrogen atom or an alkyl group of 1 to 6 carbon atoms; R′2 represents a monovalent aliphatic hydrocarbon group; and R2 represents an —SO2— containing cyclic group).
Public/Granted literature
- US20130252180A1 RESIST COMPOSITION, METHOD OF FORMING RESIST PATTERN AND POLYMERIC COMPOUND Public/Granted day:2013-09-26
Information query
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